White paper: The benefits of remote interferometery for linear, angular and straightness measurements (pdf)

文件大小: 519 kB 语言: English

This white paper examines each measurement mode (linear, angular and straightness) and explains the benefits of taking measurements interferometrically, with remote interferometer optics and the laser mounted on a tripod. It also draws attention to the importance of the environmental compensation system for linear measurement accuracy.

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