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How do interferometric systems work?

How does interferometry work?

Introduction

The most common tool in interferometry, the Michelson Interferometer was invented by Albert Abraham Michelson in 1887, the first American to win a Nobel Prize for science. He came up with a system of mirrors and semi-transparent mirrors (beam splitters) for merging separated beams of light, which are coming from the same source. Laser interferometry is a well-established method for measuring distances with great accuracy.

Basic principles

迈克尔逊干涉仪示意图

Typically a single incoming beam of coherent light source will be split into two identical beams by a Michelson interferometer. Each of these beams travels a different route, called a path, and they are recombined before arriving at a detector. The difference in the distance travelled by each beam creates a phase difference between them. It is this introduced phase difference that creates the interference pattern between the initially identical waves, which is identified on the detector. If a single beam has been split along two paths (measurement and reference), then the phase difference is diagnostic of anything that changes the phase along these paths. This could be a physical change in the path length itself or a change in the refractive index through which the beam travels.

Michelson interferometry

The laser beam (1) emerges from the laser source and gets split into two beams (reference (2) and measurement (3)) at the interferometer. These beams get reflected back from the two retroreflectors, recombine at the interferometer before reaching the detector.

激光光学镜组件

The use of retroreflectors ensures that the beams coming from the reference and measurement arms are parallel when they recombine with each other at the interferometer. The recombined beam (4) reaches the detector where they interfere with each other either constructively or destructively. During the constructive interference the two beams are in phase and the peaks of both beams reinforce each other resulting in a bright fringe, whereas during the destructive interference the beams are out of phase and the peaks of one beam are cancelled by the troughs of the second beam resulting in a dark fringe.

Signal processing

The optical signal processing in the detector allows the interference of these two beams to be observed. The displacement of the measurement beam causes change in the relative phase of the two beams. This cycle of destructive and constructive interference causes the intensity of the recombined light to undergo cyclic variation. One cycle of variation in intensity from light to dark to light occurs every time the measurement beam/retroreflector (3) is moved by half the laser wavelength.

Accuracy of the system

The accuracy of the linear positional measurements depends on the accuracy to which the wavelength of the laser beam is known. The operational wavelength of the laser beam depends on the frequency of the laser and the refractive index of the air through which it passes. This refractive index changes with any variations in air temperature, air pressure, and relative humidity.

RLE laser encoder systems

The RLE system is a unique, advanced homodyne laser interferometer system specifically designed for position feedback applications. Each RLE system consists of an RLU laser unit and one or two detector heads, the model of which is dependent upon the requirements of the specific application.

Key:

激光尺:主要RLU
RLU laser unit
激光尺:主要RLU
Detector head
激光尺:主要光学镜组
Measurement optics
RLE300 laser unit, with 2 DI differential and 2 PMI plane mirror detector heads on white background

What is in an RLE laser encoder system?

Laser sourceFibre couplingInterferometer opticsMeasurement opticsDetection schemeEncoder feedback signals
激光尺:激光源
Frequency stabilised Class 2 HeNe laser
Optical fibre for laser encoders
One or two fibre optic laser outputs that deliver laser light directly to the detector heads
激光尺:干涉仪光学镜组
Interference of laser light taking different optical paths
激光尺:测量光学镜组
Highly reflective hard oxide coated dielectric mirrors
激光尺:检测装置
Converting the interference fringes into an electronic signal
Feedback signals connectors at back of RLU laser unit, part of a laser encoder
Standard digital or analogue quadrature position feedback

What does the RLU laser unit do?

Outputs laser light to detector head


Laser sourceStabilisation electronicsFibre couplingBeam pointing stability
激光尺:激光源








Frequency stabilised Class 2 HeNe laser

激光尺:稳频电子器件
Used to control the laser frequency stability by modulating the laser tube heater assembly
Optical fibre for laser encoders

Utilising Renishaw's unique fibre optic delivery system

PMI detector head for laser encoders with red beam pointing

Key to ensuring a stable beam position on the measurement optics over extended periods of time

Processes analogue quadrature signals from the detector head


Error signals and diagnosticsSystem statusDigital interpolationAnalogue encoder signals
Connectors at back of laser unit, part of a laser encoder


Error lines report encoder status to the machine control system for robust closed loop operation. Additional information is available through a diagnostic interface.


System status connector at back of RLU laser unit

LED interface located on the front of the RLU to provide intuitive indication of operational status

激光尺:数字信号细分
User-configurable industrially-recognised RS422 digital quadrature directly from the RLU with resolution options down to 0.3 nm
激光尺:模拟信号(橙色)
Real-time analogue quadrature signal for position feedback into the motion control system


What does the detector head do?

Delivers laser beam to measurement optics

Interferometer opticsBeam steerer
激光尺:干涉仪光学镜组

Unique optical schemes with minimised SDE compatible with plane mirror measurement optics

PMI detector head for laser encoder with laser beam pointing to the left

An in-built optical wedge used to minimise the installation time by providing simplified angular beam adjustment

Generates analogue quadrature signals from measurement beam and reference beam


Analogue encoder signals Detection scheme Measurement optics
激光尺:模拟信号(绿色)

Intrinsic analogue quadrature generated from the detection scheme and passed directly to the RLU laser unit

激光尺:检测装置

In-built fringe detection scheme converts the interference fringes from the measurement and reference beams into an electronic signal

激光尺:测量光学镜组

Highly reflective hard oxide coated dielectric mirrors

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